Sugar: Advancements in a 3D Multi-domain Simulation Package for MEMS
نویسندگان
چکیده
Advancements in Sugar include 1) parameterizable netlists, 2) nonlinear frequency response analysis, 3) subnets, 4) improved MNA, 5) reduced order modeling, and 6) a more accurate nonlinear beam model. Examples of these features include the simulation of a two-axis mirror with over 10,000 degrees of freedom, the reduced order modeling applied of an electrostatic gap actuator, the parameterized deflection space of a thermal actuator and serpentine flexure, and the nonlinear response of a fixed-fixed beam.
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